Condensed Matter > Materials Science
[Submitted on 17 Jul 2007 (v1), last revised 16 Sep 2007 (this version, v2)]
Title:Digital resonance tuning of high-Q/Vm silicon photonic crystal nanocavities by atomic layer deposition
View PDFAbstract: We propose and demonstrate the digital resonance tuning of high-Q/Vm silicon photonic crystal nanocavities using a self-limiting atomic layer deposition technique. Control of resonances in discrete steps of 122 +/- 18 pm per hafnium oxide atomic layer is achieved through this post-fabrication process, nearly linear over a full 17 nm tuning range. The cavity Q is maintained in this perturbative process, and can reach up to its initial values of 49,000 or more. Our results are highly controllable, applicable to many material systems, and particularly critical to matching resonances and transitions involving mesoscopic optical cavities.
Submission history
From: Chee Wei Wong [view email][v1] Tue, 17 Jul 2007 00:25:39 UTC (495 KB)
[v2] Sun, 16 Sep 2007 20:47:23 UTC (226 KB)
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