Condensed Matter > Mesoscale and Nanoscale Physics
[Submitted on 20 Jun 2022 (v1), last revised 21 Nov 2022 (this version, v2)]
Title:Superconducting routing platform for large-scale integration of quantum technologies
View PDFAbstract:To reach large-scale quantum computing, three-dimensional integration of scalable qubit arrays and their control electronics in multi-chip assemblies is promising. Within these assemblies, the use of superconducting interconnections, as routing layers, offers interesting perspective in terms of (1) thermal management to protect the qubits from control electronics self-heating, (2) passive device performance with significant increase of quality factors and (3) density rise of low and high frequency signals thanks to minimal dispersion. We report on the fabrication, using 200 mm silicon wafer technologies, of a multi-layer routing platform designed for the hybridization of spin qubit and control electronics chips. A routing level couples the qubits and the control circuits through one layer of Al0.995Cu0.005 and superconducting layers of TiN, Nb or NbN, connected between them by W-based vias. Wafer-level parametric tests at 300 K validate the yield of these technologies and low temperature electrical measurements in cryostat are used to extract the superconducting properties of the routing layers. Preliminary low temperature radio-frequency characterizations of superconducting passive elements, embedded in these routing levels, are presented.
Submission history
From: Candice Thomas [view email][v1] Mon, 20 Jun 2022 11:53:30 UTC (2,585 KB)
[v2] Mon, 21 Nov 2022 15:43:47 UTC (3,099 KB)
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